Format:
Online-Ressource
,
online resource.
ISSN:
1432-1858
,
1432-1858
In:
day:2
In:
month:6
In:
year:2020
In:
pages:1-6
In:
Microsystem technologies, Berlin ; Heidelberg : Springer, 1994-, (2.6.2020), 1-6, 1432-1858
Language:
English
DOI:
10.1007/s00542-020-04899-2
URN:
urn:nbn:de:101:1-2020080323122893034530
URL:
https://doi.org/10.1007/s00542-020-04899-2
URL:
https://nbn-resolving.org/urn:nbn:de:101:1-2020080323122893034530
URL:
https://d-nb.info/1215090188/34
URL:
https://doi.org/10.1007/s00542-020-04899-2
Bookmarklink