Nuclear Instruments and Methods in Physics Research, B, Jan 15, 2012, Vol.271, p.107(12)
To link to full-text access for this article, visit this link: http://dx.doi.org/10.1016/j.nimb.2011.09.020 Byline: C. Jeynes, M.J. Bailey, N.J. Bright, M.E. Christopher, G.W. Grime, B.N. Jones, V.V. Palitsin, R.P. Webb Keywords: Ion beam analysis; Rutherford backscattering; Particle induced X-ray analysis; Thin films; Elemental depth profiling; Mapping; Trace elements; High sensitivity; Accurate analysis; Uncertainty budget; Blind samples; Certified reference materials; Forensics; SIMS standards Abstract: The suite of techniques which are available with the small accelerators used for MeV ion beam analysis (IBA) range from broad beams, microbeams or external beams using the various particle and photon spectrometries (including RBS, EBS, ERD, STIM, PIXE, PIGE, NRA and their variants), to tomography and secondary particle spectrometries like MeV-SIMS. These can potentially yield almost everything there is to know about the 3-D elemental composition of types of samples that have always been hard to analyse, given the sensitivity and the spacial resolution of the techniques used. Molecular and chemical information is available in principle with, respectively, MeV-SIMS and high resolution PIXE. However, these techniques separately give only partial information - the secret of "Total IBA" is to find synergies between techniques used simultaneously which efficiently give extra information. We here review how far "Total IBA" can be considered already a reality, and what further needs to be done to realise its full potential. Author Affiliation: University of Surrey Ion Beam Centre, Guildford, United Kingdom Article History: Received 14 June 2011; Revised 20 September 2011
Thin Films -- Analysis
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