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  • 1
    UID:
    b3kat_BV024483532
    Format: III, 111 S. , Ill., graph. Darst.
    Edition: Als Ms. gedr.
    Note: Zugl.: Karlsruhe, Univ., Diss. P. Krippner
    Language: German
    Keywords: Infrarotspektrometer ; Mikrosystemtechnik ; LIGA-Verfahren ; Infrarotspektrometer ; Mikrosystemtechnik ; Chopper ; LIGA-Verfahren ; Hochschulschrift
    Library Location Call Number Volume/Issue/Year Availability
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  • 2
    UID:
    b3kat_BV012855839
    Format: III, 111 S. , Ill., graph. Darst.
    Series Statement: Forschungszentrum 〈Karlsruhe〉: Wissenschaftliche Berichte 6346
    Note: Zsfassung in engl. Sprache , Zugl.: Karlsruhe, Univ., Diss., 1999
    Language: German
    Keywords: Infrarotspektrometer ; Mikrosystemtechnik ; LIGA-Verfahren ; Infrarotspektrometer ; Mikrosystemtechnik ; Chopper ; LIGA-Verfahren ; Hochschulschrift
    Library Location Call Number Volume/Issue/Year Availability
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