The Journal of Chemical Physics, 01 June 1981, Vol.74(11), pp.6448-6457
Doppler shift laser induced fluorescence spectroscopy was used to determine the relative sputtering yields and number density velocity distribution of sputtered neutral ground state zirconium atoms. Neither change in primary ion energy over the range 1–3 keV nor change in primary ion mass (Ar + , Kr + ) affected the velocity distribution despite large changes in the sputtering yield. The measured number density velocity distributions n ( v ) are well explained by standard linear collision cascade theory and follow the expression n ( v ) d v α [ v 2 /( v 2 + v 2 b ) 3 ] d v , where v b is the velocity corresponding to a surface binding energy, E b = 1/2 m Zr v 2 b , with E b = 6.305 eV, the bulk zirconium sublimation energy. Surprisingly, the number density velocity distributions of zirconium atoms sputtered in two excited states ( a 3 F 3,4 ) are indistinquishable from that measured for ground state zirconium atoms. Further, the sputtering yield dependence on primary ion energy for the 3 F 3,4 was also, within experimental error, the same as for the 3 F 2 ground state zirconium. The sputtering yield for the two excited states represents almot 40% of the total yield of zirconium. Evaluation of the results incorporates for the first time the effects of power broadening, transit time broadening, and velocity dependent fluorescent detection efficiencies.
Classical And Quantum Mechanics, General Physics ; Argon Ions ; Collisions ; Krypton Ions ; Zirconium ; Sputtering ; Distribution ; Fluorescence ; Ion Beams ; Kev Range 01-10 ; Surfaces ; Velocity ; Beams ; Charged Particles ; Elements ; Energy Range ; Ions ; Kev Range ; Luminescence ; Metals ; Transition Elements ; 640301 - Atomic, Molecular & Chemical Physics- Beams & Their Reactions;