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  • Kersten, Holger  (8)
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  • 1
    Language: English
    In: Surface & Coatings Technology, 25 October 2018, Vol.352, pp.663-670
    Description: We report on direct calorimetric probe measurements in a plasma based ion implantation and deposition (PBII&D) system, using HiPIMS as plasma and deposition source. The combination of ion implantation and physical vapor deposition is a versatile system which allows successive and simultaneous coating, doping or cleaning of a substrate surface in a complex, finely adjustable system. Due to the pulsed nature of both processes, the delay between HiPIMS and PBII pulse is a crucial parameter which can be used to effectively tune the process according to the required needs. Since the delay defines at what time during the HiPIMS period the PBII pulse is applied to the substrate, it can also be utilized to obtain time resolved information about the ion density in the substrate's environment. To allow direct calorimetric measurement of a high voltage pulsed substrate, a common passive thermal probe (PTP) was modified utilizing a fiber optic temperature sensor. With this probe, the effect of PBII voltage, substrate distance and pressure, on the energy flux and ion current towards the PBII substrate was investigated as a function of the delay between HiPIMS and PBII pulse. The results were successfully compared to a basic model and revealed important information regarding substrate position, process pressure and the effect of secondary electrons in this combined system.
    Keywords: Calorimetric Probe ; Hipims ; Pbii&D ; Pbii ; Magnetron Sputtering ; Energy Flux ; Engineering ; Chemistry
    ISSN: 0257-8972
    E-ISSN: 1879-3347
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  • 2
    Language: English
    In: EPJ Techniques and Instrumentation, 2017, Vol.4(1), pp.1-9
    Description: High energy influxes increase the complexity of passive calorimetric probe measurements because of an increasing temperature of the surrounding materials like the probe holder. This leads to a distinctively different evolution of the probe temperature compared to low energy influxes. Different established methods for the analysis of passive calorimetric probe data are presented and it is shown that they are not applicable for high energy influx measurements resulting in the requirement of a novel analysis approach. Such an approach is given in this paper by the combination of the exponential and the linear method. The high energy influx measurements are studied for a commercial atmospheric pressure plasma jet, in order to illustrate our suggested modified approach.
    Keywords: Calorimetric probe ; High energy influx ; Atmospheric pressure plasma jet ; Plasma diagnostics
    E-ISSN: 2195-7045
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  • 3
    Language: English
    In: Plasma Processes and Polymers, September 2012, Vol.9(9), pp.904-910
    Description: Plasma diagnostics have been used to understand chemical reactions that take place in a radio frequency plasma containing aluminum isopropoxide (ATI). Mass spectrometry was used to detect the formed reaction products in the plasma focusing on monomeric ATI. The organometallic precursor is fragmented in the plasma and forms organoaluminum compounds. These molecules are found at masses between 40 and 200 amu. On the basis of the mass spectrometric investigations processes and paths of fragmentation are proposed. A particular importance has the mass 59 amu, which can inter alia be assigned to a hydrocarbon group fragmented from ATI. This group is included three times in a monomeric ATI molecule. Beside this hydrocarbon group detached methyl groups seem to be the starting point for polymerization processes, which are leading to organic molecules (CH) with higher masses. Mass spectrometric analyses are performed to investigate ATI containing rf‐plasma regarding the fragmentation as well as polymerization processes taking place. The organometallic precursor is fragmented in the plasma and forms organoaluminum compounds besides occurring polymerization starting from hydrocarbon group, presumably, which is fragmented from ATI molecule.
    Keywords: Aluminum Isopropoxide ; Fragmentation ; Mass Spectrometry
    ISSN: 1612-8850
    E-ISSN: 1612-8869
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  • 4
    Language: English
    In: Plasma Sources Science and Technology, 2017, Vol.26(6), p.065013 (10pp)
    Description: The combination of high-power impulse magentron sputtering (HiPIMS) and plasma based ion implantation (PBII) gives a versatile system which allows successive and simultaneous coating, doping or cleaning of a substrate surface in a single process. The delay between HiPIMS and PBII pulse is a critical parameter for the synchronization of the pulses as it defines at what time during the HiPIMS period the high voltage is applied to the substrate. To investigate the effect of this parameter on the energy flux towards the PBII substrate, VI-probe and calorimetric probe measurements were performed illustrating the effect of the delay for different PBII pulse durations and PBII voltages. The calorimetric measurements were performed utilizing a grid setup which allowed us to derive conclusions even when using a detector that is not at the PBII voltage. A maximum of electrical power and energy flux was observed for delay times significantly longer than the duration of the HiPIMS pulse. The investigation of different PBII pulse durations and PBII voltages confirmed that these parameters affect the absolute values of the energy flux and electrical power but do not significantly affect the transport of the ions as the PBII potential is shielded by a sheath.
    Keywords: Pulsdauer ; Ionenimplantation ; Elektroenergie ; Elektrische Leistung ; Verzögerungszeit ; Spannung (Elektrisch) ; Hochspannung ; Kalorimetrie ; Physics;
    ISSN: 0963-0252
    E-ISSN: 1361-6595
    Source: IOPscience (IOP Publishing)
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  • 5
    Language: English
    In: Contributions to Plasma Physics, 2014, Vol.54, p.170
    Description: In Ar and Ar/N2 radio frequency (RF) discharges with admixtures of aluminium tri-isopropoxide (ATI) the fragmentation of this metal-organic precursor was studied by means of Fourier Transform Infrared (FTIR) spectroscopy using an optical long path cell providing an optical length of l=...
    Keywords: Engineering Sciences ; Plasmas ; Physics ; Physics ; Plasma Physics ; Ati ; Alxoy Film Deposition ; Plasma Chemistry ; Ftir-Spectroscopy ; Physics
    ISSN: 0863-1042
    E-ISSN: 1521-3986
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  • 6
    Language: English
    In: DPG Spring Meeting (Deutsche Physikalische Gesellschaft)
    Description: Metal oxide films are widely used in a variety of products. Their properties make them interesting for a growing field of applications. Due to their hardness, chemical resistance and low conductivity, they are applied e.g. in the production of cutting tools, in solar cells or in OLEDs....
    Keywords: Engineering Sciences ; Plasmas ; Physics ; Physics ; Plasma Physics ; Plasma ; Aluminium Tri-Isopropoxide ; Ati ; Fourier Transform Infrared ; Ftir ; Physics
    Source: Hyper Article en Ligne (CCSd)
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  • 7
    Language: English
    In: Euro Intelligent Materials 2013
    Description: Metal oxide films are widely used in a variety of products. Their properties make them interesting for a growing field of applications. Especially alumina is of high interest due to its hardness, chemical resistance, low conductivity and capacity as diffusion barrier. Therefore, Al2O3 is...
    Keywords: Engineering Sciences ; Plasmas ; Physics ; Physics ; Plasma Physics ; Plasma ; Aluminium Tri-Isopropoxide ; Ati ; Fourier Transform Infrared ; Ftir ; Physics
    Source: Hyper Article en Ligne (CCSd)
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  • 8
    Language: English
    In: 10th Frontiers in Low Temperature Plasma Diagnostics
    Description: The deposition of metal oxide layers is of increasing interest. Their properties open up a large field of applications. E. g. Al2O3 layers on cutting tools provide hardened surfaces with increased resistance functionality. Furthermore, the...
    Keywords: Engineering Sciences ; Plasmas ; Physics ; Physics ; Plasma Physics ; Plasma ; Aluminium Tri-Isopropoxide ; Ati ; Fourier Transform Infrared ; Ftir ; Physics
    Source: Hyper Article en Ligne (CCSd)
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