Format:
XII, 125 S.
,
Ill., graph. Darst.
ISBN:
9783540695615
,
3540695613
Series Statement:
Microtechnology and MEMS
Note:
Literaturverz. S. 113 - 121
Language:
English
Subjects:
Engineering
Keywords:
Kochplatte
;
Integrierter Sensor
;
Mikrosensor
;
Metalloxid-Gassensor
;
CMOS
;
Mikrosystemtechnik
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