ISSN:
1879-2723
Content:
Many applications in materials science, life science and process control would benefit from atomic force microscopes (AFM) with higher scan speeds. To achieve this, the performance of many of the AFM components has to be increased. In this work, we focus on the cantilever sensor, the scanning unit and the data acquisition. We manufactured wide cantilevers which combine high resonance frequencies with low spring constants (160-360 kHz with spring constants of 1-5 pN/nm). For the scanning unit, we developed a new scanner principle, based on stack piezos, which allows the construction of a scanner with scan range while retaining high resonance frequencies . To drive the AFM at high scan speeds and record the height and error signal, we implemented.
In:
Ultramicroscopy, Amsterdam : Elsevier Science, 1975, 106(2006), 8/9, Seite 881-887, 1879-2723
In:
volume:106
In:
year:2006
In:
number:8/9
In:
pages:881-887
Language:
English
Author information:
Rangelow, Ivo W.
Author information:
Ivanov, Tzvetan 1973-
Bookmarklink