In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 5, No. 3 ( 1987-05-01), p. 364-371
Abstract:
Four electrostatic lenses are analyzed with respect to field emission ion and electron sources for beam energies of 5 to 50 keV. The ion sources considered are the hydrogen field ionization and gallium liquid metal ion sources, while the electron source considered is the thermal field emission source. The lenses analyzed are (1) the three-element asymmetric lens of Orloff and Swanson, (2) the previous lens only reversed, (3) a symmetric version of the previous three-element lenses, and (4) the four-element condenser lens of Kurihara. For the extraction voltage (7.5 keV) and working distance (50 mm) used in this study, the asymmetric lens of Orloff–Swanson operating in the acceleration mode typically results in a smaller spot at low beam energies (5 keV), while the four-element lens of Kurihara operating in the acceleration mode results in a smaller spot at higher beam energies ( & gt;15 keV).
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1987
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
Bookmarklink
