Format:
Online-Ressource
ISSN:
1612-8869
Content:
Abstract: A 1‐D fluid code simulation of the region above the racetrack in a magnetron discharge has been developed to yield predictions for the temporal evolution of the axial plasma parameters during pulsed DC operation. To take into account anomalous cross‐field diffusion transport rates, an effective magnetic field profile has been calculated based on the real experimental values, to yield ratios in the effective electron gyro and collision frequencies comparable with Bohm diffusion. Pulse frequencies from 100 to 500 kHz are considered, with gas pressures ranging from 0.25 to 0.65 Pa. The model results for the plasma potential, electron and ion densities, during the pulse cycle agree well with experimental measurements made in the Liverpool magnetron using time‐resolved Langmuir and emissive probes. In the bulk plasma, the predictions for electron temperature are close to the measured values; however, in the sheath region they are artificially high due to the model assumption that only Maxwellian distributed electrons exist in all regions of the discharge. This inadequacy in the model and the methods to improve has been discussed. Results for DC magnetrons are also shown.
In:
volume:6
In:
number:S1
In:
year:2009
In:
pages:S767-S775
In:
extent:9
In:
Eleventh International Conference on Plasma Surface Engineering (PSE2008) 1
In:
Plasma processes and polymers, Weinheim : Wiley-VCH, [2004]-, 6, Heft S1 (2009), S767-S775 (gesamt 9), Eleventh International Conference on Plasma Surface Engineering (PSE2008) 1, 1612-8869
Language:
English
DOI:
10.1002/ppap.200931902
URN:
urn:nbn:de:101:1-2023042007020571661786
URL:
https://doi.org/10.1002/ppap.200931902
URL:
https://nbn-resolving.org/urn:nbn:de:101:1-2023042007020571661786
URL:
https://d-nb.info/1286707102/34
URL:
https://doi.org/10.1002/ppap.200931902
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