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Uniform Quantum Wire and Quantum Dot Arrays by Natural Self-Faceting on Patterned Substrates

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The combination of self-organized growth on high-index substrates with lithographic patterning and atomic hydrogen assistance allows the fabrication of GaAs quantum wires and quantum dots as well as coupled wire-dot arrays with superior structural and electronic properties by molecular beam epitaxy. The selectivity of patterned growth on high-index substrates differs qualitatively from that on low-index ones thus producing quantum wire and quantum dot structures which fulfill the stringent criteria on the geometrical features to be met for useful devices.

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Correspondence to Richard Nötzel.

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Nötzel, R., Fricke, J., Niu, Z. et al. Uniform Quantum Wire and Quantum Dot Arrays by Natural Self-Faceting on Patterned Substrates. MRS Online Proceedings Library 570, 105–116 (1999). https://doi.org/10.1557/PROC-570-105

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  • DOI: https://doi.org/10.1557/PROC-570-105

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