Skip to main content
SpringerLink
Log in

157-nm laser micromachining of N-BK7 glass and replication for microcontact printing

  • Regular Paper
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

We report etch-rate and probe-beam-deflection studies of N-BK7 glass ablated using a 157-nm F2 laser. It is found that controllable material removal at the nanometre level is possible above an ablation threshold of 250 mJ cm-2. Contact mask printing shows well-defined features can be micromachined in this glass with sub-micron resolution capability. Micro-features produced in this way have been replicated by polydimethylsiloxane (PDMS) moulding and the stamps used to print arrays of fluorescent molecules with sub-micron fidelity.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. T.M. Bloomstein, M.W. Horn, M. Rothschild, R.R. Kunz, S.T. Palmacci, R.B. Goodman: J. Vac. Sci. B 15, 2112 (1997)

    Article  Google Scholar 

  2. P.R. Herman, K. Beckley, B. Jackson, K. Kurosawa, D. Moore, T. Yamanisha, J. Zhang: Proc. SPIE 2992, 86 (1997)

    ADS  Google Scholar 

  3. P.R. Herman, K.P. Chen, M. Wei, J. Zhang, J. Ihlemann, D. Schafer, G. Marowsky, P. Oesterlin, B. Burghardt: SPIE Proc. 4274, 574 (2001)

  4. P.E. Dyer, S.M. Maswadi, H.V. Snelling, C.D. Walton: Proc. SPIE 4637, 218 (2002)

    Article  ADS  Google Scholar 

  5. Y. Xia, G.M. Whitesides: Angew. Chem. Int. Ed. 37, 550 (1998)

    Article  Google Scholar 

  6. J.A. Sell, D.M. Heffelfinger, P. Ventzek, R.M. Gilgenbach: Appl. Phys. Lett. 55, 2435 (1989)

    Article  ADS  Google Scholar 

  7. R.S. Longhurst: Geometrical and Physical Optics (Longmans, London 1964)

  8. G.R. Fowles: Introduction to Modern Optics (Holt, Rinehart and Winston, New York 1975)

  9. Schott Optics Glass Catalogue data sheet No. 517642.251

Download references

Author information

Authors and Affiliations

  1. Dept. of Physics, University of Hull, HU6 7RX, Hull , UK

    P.E. Dyer , S.M. Maswadi  & C.D. Walton

  2. Dept. of Chemistry, University of Hull, HU6 7RX, Hull , UK

    M. Ersoz , P.D.I. Fletcher  & V.N. Paunov

Authors
  1. P.E. Dyer
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S.M. Maswadi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C.D. Walton
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Ersoz
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. P.D.I. Fletcher
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. V.N. Paunov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to P.E. Dyer .

Additional information

PACS

45.55.Lt; 52.38.Mf; 87.80.Mj; 42.70.Ce

Rights and permissions

Reprints and permissions

About this article

Cite this article

Dyer , P., Maswadi , S., Walton , C. et al. 157-nm laser micromachining of N-BK7 glass and replication for microcontact printing. Appl Phys A 77, 391–394 (2003). https://doi.org/10.1007/s00339-002-1936-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-002-1936-0

Keywords

Search

Navigation