Format:
xxi, 794 p.
,
ill
Edition:
2nd ed
Edition:
Online_Ausgabe Boulder, Colo NetLibrary 2003 E-Books von NetLibrary Sonstige Standardnummer des Gesamttitels: 22382847
ISBN:
0585470979
Note:
Includes bibliographical references and index
,
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films
Additional Edition:
Reproduktion von Ohring, Milton Materials science of thin films 2002
Language:
English
Subjects:
Engineering
,
Physics
Keywords:
Dünne Schicht
;
Dünnschichttechnik
;
Electronic books.
;
Electronic books.
;
Electronic books
;
Electronic books.
;
Electronic books
URL:
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