UID:
almafu_9959327550502883
Format:
1 online resource (xxii, 486 pages) :
,
illustrations
Edition:
Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010.
ISBN:
9780470017944
,
0470017945
,
9780470065419
,
0470065419
Content:
The topic of thin films is an area of increasing℗¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices.
Note:
Low and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition /
,
Spin-on dielectric materials /
,
Positron annihilation spectroscopy /
,
Structure characterization of nanoporous interlevel dielectric thin films with x-ray and neutron radiation /
,
Ellipsometric porosimetry /
,
Mechanical and transport properties of low-k dielectrics /
,
Integration of low-k dielectric films in damascene processes /
,
ONO structures and oxynitrides in modern microelectronics : material science, characterization and application /
,
Material engineering of high-k gate dielectrics /
,
Physical characterization of ultra-thin high-k dielectric /
,
Electrical characterization of advanced gate dielectrics /
,
Integration issues of high-k gate dielectrics /
,
Anisotropic conductive film (ACF) for advanced microelectronic interconnects /
,
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Additional Edition:
Print version: Dielectric films for advanced microelectronics. Chichester, England ; Hoboken, NJ : John Wiley & Sons, ©2007 ISBN 9780470013601
Additional Edition:
ISBN 0470013605
Language:
English
Keywords:
Electronic books.
;
Electronic books.
;
Electronic books.
DOI:
10.1002/9780470017944
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944
URL:
https://onlinelibrary.wiley.com/doi/book/10.1002/9780470017944
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