Format:
338 S
,
Ill., graph. Darst
ISBN:
0849309166
,
9780849309168
Series Statement:
Nano- and microscience, engineering, technology, and medicine series [1]
Note:
Includes bibliographical references
Language:
English
Subjects:
Engineering
Keywords:
Mikrosystemtechnik
URL:
http://www.loc.gov/catdir/enhancements/fy0661/00057953-d.html
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