Format:
9
ISSN:
0960-1317
Content:
A compact linear micromechanical stepping drive for positioning a 7 × 5.5 mm^2 optical pinhole array is presented. The system features a step size of 13.2 [my]m and a full displacement range of 200 [my]m. The electrostatic inch-worm stepping mechanism shows a compact design capable of positioning a payload 50% of its own weight. The stepping drive movement, step sizes and position accuracy are characterized. The actuated pinhole array is integrated in a confocal chromatic hyperspectral imaging system, where coverage of the object plane, and therefore the useful picture data, can be multiplied by 14 in contrast to a non-actuated array.
In:
Journal of micromechanics and microengineering, Bristol : IOP Publ., 1991, 25(2015), 5, Seite 055009, 0960-1317
In:
volume:25
In:
year:2015
In:
number:5
In:
pages:055009
In:
extent:9
Language:
English
Author information:
Hoffmann, Martin 1966-
Author information:
Mehner, Hannes 1986-
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