Format:
1 online resource (221 pages
,
186 illustrations).
ISBN:
9781000023367
,
1000023362
,
9780429291890
,
0429291892
,
9781000023220
,
1000023222
,
9781000023299
,
100002329X
Content:
Overview of CMP technology -- Interlayer dielectric CMP -- Shallow trench isolation CMP -- Copper CMP -- Nanotopography -- Novel CMP for next-generation devices.
Additional Edition:
ISBN 1420059114
Additional Edition:
Erscheint auch als Druck-Ausgabe ISBN 9781420059113
Language:
English
Keywords:
Electronic books
DOI:
10.1201/9780429291890
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