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  • 1
    UID:
    almafu_9959327076702883
    Format: 1 online resource (xix, 463 pages) : , illustrations
    ISBN: 0471784060 , 9780471784067 , 0471790273 , 9780471790273 , 0471790281 , 9780471790280 , 9781615838455 , 1615838457 , 1280450231 , 9781280450235 , 9786610450237 , 6610450234 , 0470359161 , 9780470359167
    Content: "Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modelling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts." "Graduate-level students and industrial practitioners will benefit from the detailed examination of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment."--Jacket.
    Note: Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis. , English.
    Additional Edition: Print version: May, Gary S. Fundamentals of semiconductor manufacturing and process control. [Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, ©2006 ISBN 0471784060
    Language: English
    Keywords: Electronic books. ; Electronic books. ; Electronic books. ; Electronic books. ; Electronic books. ; Electronic books.
    Library Location Call Number Volume/Issue/Year Availability
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