Format:
Online-Ressource
ISBN:
9781467356541
,
1467356557
,
1467356549
,
9781467356558
,
9781467356541
Note:
"IEEE Catalog Number: CFP13MEM-ART
,
Includes bibliographical references
,
Title from title screen, viewed May 29, 2013
Additional Edition:
ISBN 9781467356558
Additional Edition:
Erscheint auch als Druck-Ausgabe 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) Piscataway, NJ : IEEE, 2013 ISBN 9781467356541
Language:
English
Keywords:
Mikrosystemtechnik
;
Konferenzschrift
URL:
Volltext
(lizenzpflichtig)
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