Format:
1 Online-Ressource (XVIII, 288 Seiten)
ISBN:
9783030232993
Series Statement:
Springer Series in Materials Science volume 288
Content:
Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook
Content:
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users
Additional Edition:
ISBN 9783030232986
Additional Edition:
Erscheint auch als Druck-Ausgabe ISBN 978-3-030-23298-6
Additional Edition:
Erscheint auch als Druck-Ausgabe Rebohle, Lars, 1970 - Flash lamp annealing Cham, Switzerland : Springer, 2019 ISBN 9783030232986
Additional Edition:
ISBN 3030232980
Additional Edition:
ISBN 9783030233013
Language:
English
Subjects:
Engineering
DOI:
10.1007/978-3-030-23299-3
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