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  • 1
    Online Resource
    Online Resource
    Gettering Defects in Semiconductors (2005)
    Berlin [u.a.] : Springer
    Details
    UID:
    b3kat_BV036650648
    Format: 1 Online-Ressource
    Edition: Online-Ausgabe Springer ebook collection / Chemistry and Materials Science 2005-2008 Sonstige Standardnummer des Gesamttitels: 041171-1
    ISBN: 9783540294993
    Series Statement: Springer Series in Advanced Microelectronics 19
    Additional Edition: Reproduktion von Perevoščikov, Viktor A. Gettering Defects in Semiconductors 2005
    Additional Edition: Erscheint auch als Druckausgabe ISBN 978-3-540-26244-2
    Language: English
    Subjects: Engineering , Physics
    RVK:
    UQ 2400
    RVK:
    ZN 4800
    Keywords: Halbleiter ; Störstelle ; Getterung
    DOI: 10.1007/3-540-29499-6
    URL: Volltext
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    HWR Berlin
    TH Brandenburg
    HTW Berlin
    TH Wildau
    BTU Cottbus
    BHT
  • 2
    Online Resource
    Online Resource
    Gettering defects in semiconductors / (2005)
    Berlin ; : Springer,
    Details
    UID:
    edocfu_9958098453702883
    Format: 1 online resource (400 p.)
    Edition: 1st ed. 2005.
    ISBN: 1-280-34691-4 , 9786610346912 , 3-540-29499-6
    Series Statement: Springer series in advanced microelectronics, 19
    Content: Gettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists; – to fill a gap in the contemporary literature on the underlying semiconductor-material theory. The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid–state microelectronics and nanoelectronics. A comprehensive list of references provides readers with direction for further reading.
    Note: Description based upon print version of record. , Basic technological processes and defect formation in the components of device structures -- Effects of defects on electrophysical and functional parameters in semiconducting structures and devices -- Techniques for high-temperature gettering -- Physical foundations for low-temperature gettering techniques. , English
    Additional Edition: ISBN 3-642-06570-8
    Additional Edition: ISBN 3-540-26244-X
    Language: English
    DOI: 10.1007/3-540-29499-6
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    Open Access Request
    FU Berlin
    Charité
  • 3
    Online Resource
    Online Resource
    Gettering Defects in Semiconductors (2005)
    Berlin, Heidelberg : Springer Berlin Heidelberg
    Details
    UID:
    gbv_164530213X
    Format: Online-Ressource (XV, 386 p, 70 illus, digital)
    ISBN: 9783540294993
    Series Statement: Springer Series in Advanced Microelectronics 19
    Additional Edition: ISBN 9783540262442
    Additional Edition: Buchausg. u.d.T. Perevoščikov, Viktor A. Gettering defects in semiconductors Berlin : Springer, 2005 ISBN 354026244X
    Additional Edition: ISBN 9783540262442
    Language: English
    Subjects: Physics
    RVK:
    UQ 2400
    Keywords: Halbleiter ; Störstelle ; Getterung
    DOI: 10.1007/3-540-29499-6
    URL: Volltext
    URL: Cover
    URL: Inhaltstext
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    Stabi Berlin
  • 4
    Online Resource
    Online Resource
    Gettering defects in semiconductors (2005)
    Berlin : Springer
    Details
    UID:
    gbv_524966486
    Format: Online-Ressource , Ill., graph. Darst.
    Edition: Online-Ausg. 2005 Springer eBook Collection. Chemistry and Materials Science Electronic reproduction; Available via World Wide Web
    ISBN: 9783540294993
    Series Statement: Springer series in advanced microelectronics 19
    Note: Includes bibliographical references (p. [343]-366) and indexes , Electronic reproduction; Available via World Wide Web
    Additional Edition: ISBN 9783540262442
    Additional Edition: Erscheint auch als Druck-Ausgabe Perevoščikov, Viktor A. Gettering defects in semiconductors Berlin : Springer, 2005 ISBN 354026244X
    Additional Edition: ISBN 9783540262442
    Language: English
    Subjects: Engineering , Physics
    RVK:
    ZN 4800
    RVK:
    UQ 2400
    Keywords: Halbleiter ; Störstelle ; Getterung
    DOI: 10.1007/3-540-29499-6
    URL: Volltext
    URL: Volltext  (lizenzpflichtig)
    URL: Inhaltsverzeichnis
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    UB Potsdam
  • 5
    Book
    Book
    Gettering defects in semiconductors (2005)
    Berlin [u.a.] : Springer-Verlag
    Details
    UID:
    kobvindex_ZLB13935283
    Format: XV, 386 Seiten , Ill., graph. Darst. , 24 cm
    Edition: 1. Ed.
    ISBN: 9783540262442 , 354026244X
    Series Statement: Advanced microelectronics 19
    Note: Literaturverz. S. 343 - 366
    Language: English
    Keywords: Halbleiter ; Störstelle ; Getterung
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    Berlin VÖBB/ZLB get availability status
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