UID:
almahu_9949199511402882
Umfang:
XIV, 529 p.
,
online resource.
Ausgabe:
2nd ed. 1998.
ISBN:
9783540389675
Serie:
Springer Series in Optical Sciences, 45
Inhalt:
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Anmerkung:
Electron Optics of a Scanning Electron Microscope -- Electron Scattering and Diffusion -- Emission of Backscattered and Secondary Electrons -- Electron Detectors and Spectrometers -- Image Contrast and Signal Processing -- Electron-Beam-Induced Current and Cathodoluminescence -- Special Techniques in SEM -- Crystal Structure Analysis by Diffraction -- Elemental Analysis and Imaging with X-Rays.
In:
Springer Nature eBook
Weitere Ausg.:
Printed edition: ISBN 9783642083723
Weitere Ausg.:
Printed edition: ISBN 9783540639763
Weitere Ausg.:
Printed edition: ISBN 9783662141724
Sprache:
Englisch
DOI:
10.1007/978-3-540-38967-5
URL:
https://doi.org/10.1007/978-3-540-38967-5
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