Umfang:
Online-Ressource
Ausgabe:
Online-Ausg. 2011 Electronic reproduction; Available via World Wide Web
ISBN:
9783862191130
Inhalt:
Front cover -- Title page -- Imprint -- Acknowledgements -- Abstract -- Zusammenfassung -- Contents -- 1. Introduction and Motivation -- 2. Foundations of Nanoimprint Technology: Stateof the Art -- 2.1. Introduction -- 2.2. Overview of Different Nanoimprint Methods -- 2.2.1. Thermal Nanoimprint -- 2.2.2. UV Nanoimprint -- 2.2.3. Soft Nanoimprint -- 2.2.4. Combination and Variation Methods -- 2.2.5. Potential Industrial Techniques -- 2.3. Nanoimprint Devices and Tools -- 2.3.1. Nanoimprint Templates -- 2.3.2. Nanoimprint Resists -- 2.3.3. Nanoimprint Equipments -- 2.4. Applications of Nanoimprint -- 2.4.1. Lithography -- 2.4.2. Direct Patterning -- 2.4.3. Application of 3D Nanoimprint -- 3. Foundations of Fabrication Technologies Relevant for 3D Nanoimprint at INA -- 3.1. Template fabrication Technology and Relevant Tools -- 3.1.1. Photolithography -- 3.1.2. Dry Etching -- 3.1.3. White Light Interferometry -- 3.2. Nanoimprint Technology and Relevant Tools -- 3.2.1. UV Nanoimprint -- 3.2.2. Substrate Conformal Imprint Lithography -- 4. Technology Development of 3D Nanoimprint Templates -- 4.1. Methodology of Template fabrication -- 4.1.1. General fabrication method of 3D templates -- 4.1.2. Digital Etching -- 4.2. Development of High Vertical Resolution 3D Nanoimprint Templates -- 4.2.1. Possible Solutions for Fabricating 3D Templates -- 4.2.2. Development and Improvement of Template fabrication Process -- 4.2.3. Characterization of Etching Process -- 4.2.4. Experimental Results and Discussion -- 4.3. Development of 3D Transparent Templates for UV-NIL -- 4.3.1. Technology Development -- 4.3.2. Characterization of Etching Process -- 4.3.3. Experimental Results and Discussion -- 4.4. Development of 3D Master Templates for Soft UV-NILand SCIL -- 4.4.1. Technology Development of 3D Master Templates
Inhalt:
4.4.2. Experimental Results of 3D Master Templates and Discussion -- 4.4.3. SCIL Templates Replication -- 5. Application of 3D Nanoimprint for Nanospectrometers -- 5.1. Theoretical Overview: Fabry-Pérot-Filter-based Nanospectrometer -- 5.1.1. Foundation of Fabry-Pérot Filter -- 5.1.2. State of the Art: Fabry-Pérot-Filter-based Microspectrometer -- 5.2. Static Sensor Arrays -- 5.2.1. Introduction and Design -- 5.2.2. Fabrication Process -- 5.2.3. Filter Cavities Structuring using 3D Nanoimprint -- 5.2.4. Characterization of Static Sensor Arrays -- 5.2.5. Summary -- 5.3. Tunable Optical Sensor Arrays -- 5.3.1. Introduction and Design -- 5.3.2. Fabrication Process -- 5.3.3. Sacrificial Layers Structuring using 3D Nanoimprint -- 6. Conclusion and Outlook -- Appendix -- A1 MATLAB® Codes -- A2 Mask Design -- A3 Process Flow -- List of Abbreviations -- References -- Back cover
Anmerkung:
Lizenzpflichtig
,
Zugl.: Kassel, Univ., Diss., 2010
,
""Front cover ""; ""Title page ""; ""Imprint ""; ""Acknowledgements""; ""Abstract""; ""Zusammenfassung""; ""Contents""; ""1. Introduction and Motivation""; ""2. Foundations of Nanoimprint Technology: Stateof the Art""; ""2.1. Introduction""; ""2.2. Overview of Different Nanoimprint Methods""; ""2.2.1. Thermal Nanoimprint""; ""2.2.2. UV Nanoimprint""; ""2.2.3. Soft Nanoimprint""; ""2.2.4. Combination and Variation Methods""; ""2.2.5. Potential Industrial Techniques""; ""2.3. Nanoimprint Devices and Tools""; ""2.3.1. Nanoimprint Templates""; ""2.3.2. Nanoimprint Resists""
,
""2.3.3. Nanoimprint Equipments""""2.4. Applications of Nanoimprint""; ""2.4.1. Lithography""; ""2.4.2. Direct Patterning""; ""2.4.3. Application of 3D Nanoimprint""; ""3. Foundations of Fabrication Technologies Relevant for 3D Nanoimprint at INA""; ""3.1. Template fabrication Technology and Relevant Tools""; ""3.1.1. Photolithography""; ""3.1.2. Dry Etching""; ""3.1.3. White Light Interferometry""; ""3.2. Nanoimprint Technology and Relevant Tools""; ""3.2.1. UV Nanoimprint""; ""3.2.2. Substrate Conformal Imprint Lithography""; ""4. Technology Development of 3D Nanoimprint Templates""
,
""4.1. Methodology of Template fabrication""""4.1.1. General fabrication method of 3D templates""; ""4.1.2. Digital Etching""; ""4.2. Development of High Vertical Resolution 3D Nanoimprint Templates""; ""4.2.1. Possible Solutions for Fabricating 3D Templates""; ""4.2.2. Development and Improvement of Template fabrication Process""; ""4.2.3. Characterization of Etching Process""; ""4.2.4. Experimental Results and Discussion""; ""4.3. Development of 3D Transparent Templates for UV-NIL""; ""4.3.1. Technology Development""; ""4.3.2. Characterization of Etching Process""
,
""4.3.3. Experimental Results and Discussion""""4.4. Development of 3D Master Templates for Soft UV-NILand SCIL""; ""4.4.1. Technology Development of 3D Master Templates""; ""4.4.2. Experimental Results of 3D Master Templates and Discussion""; ""4.4.3. SCIL Templates Replication""; ""5. Application of 3D Nanoimprint for Nanospectrometers""; ""5.1. Theoretical Overview: Fabry-Pérot-Filter-based Nanospectrometer""; ""5.1.1. Foundation of Fabry-Pérot Filter""; ""5.1.2. State of the Art: Fabry-Pérot-Filter-based Microspectrometer""; ""5.2. Static Sensor Arrays""
,
""5.2.1. Introduction and Design""""5.2.2. Fabrication Process""; ""5.2.3. Filter Cavities Structuring using 3D Nanoimprint""; ""5.2.4. Characterization of Static Sensor Arrays""; ""5.2.5. Summary""; ""5.3. Tunable Optical Sensor Arrays""; ""5.3.1. Introduction and Design""; ""5.3.2. Fabrication Process""; ""5.3.3. Sacrificial Layers Structuring using 3D Nanoimprint""; ""6. Conclusion and Outlook""; ""Appendix""; ""A1 MATLAB® Codes""; ""A2 Mask Design""; ""A3 Process Flow""; ""List of Abbreviations""; ""References""; ""Back cover ""
,
Electronic reproduction; Available via World Wide Web
Weitere Ausg.:
ISBN 9783862191123
Weitere Ausg.:
Erscheint auch als Druck-Ausgabe High resolution 3D nanoimprint technology
Sprache:
Englisch
Schlagwort(e):
Mikrooptik
;
Spektrometer
;
Optisches Filter
;
Fabry-Pérot-Resonator
;
Nanoprägen
;
MEMS
;
Hochschulschrift
;
Academic theses.
;
Academic theses.
;
Thèses et écrits académiques.
URN:
urn:nbn:de:0002-31132
URL:
Volltext
(lizenzpflichtig)
Mehr zum Autor:
Wang, Xiaolin 1982-
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