In:
SID Symposium Digest of Technical Papers, Wiley, Vol. 43, No. 1 ( 2012-06), p. 345-347
Kurzfassung:
A flexible hybrid substrate was demonstrated for Roll‐to‐Roll (R2R) manufacturing. Layer‐by‐layer misalignment can be well controlled within 5μm. Amorphous InGaZnO (a‐IGZO) TFT was fabricated on the flexible hybrid substrate by R2R process for the first time. A segment‐type reflective EPD display was also demonstrated to show the R2R capability of flexible substrates.
Materialart:
Online-Ressource
ISSN:
0097-966X
,
2168-0159
DOI:
10.1002/sdtp.2012.43.issue-1
DOI:
10.1002/j.2168-0159.2012.tb05786.x
Sprache:
Englisch
Verlag:
Wiley
Publikationsdatum:
2012
ZDB Id:
2526337-7