In:
SID Symposium Digest of Technical Papers, Wiley, Vol. 45, No. 1 ( 2014-06), p. 972-974
Abstract:
In this paper, a‐IGZO TFT fabricated with sputtered process and annealed with low temperature is investigated. For all the prcoess, the maximum process temperature is as low as 300°C In addition, a 3.8 inch WVGA AM‐LCD driven by a‐IGZO TFTs is successfully demonstrated.
Type of Medium:
Online Resource
ISSN:
0097-966X
,
2168-0159
DOI:
10.1002/sdtp.2014.45.issue-1
DOI:
10.1002/j.2168-0159.2014.tb00252.x
Language:
English
Publisher:
Wiley
Publication Date:
2014
detail.hit.zdb_id:
2526337-7
