In:
SID Symposium Digest of Technical Papers, Wiley, Vol. 46, No. 1 ( 2015-06), p. 1344-1347
Kurzfassung:
LGD has developed M+ technology for reduces power consumption. The core technology is the development of WCS photoresist. We developed in the following two technologies. 1. The binder polymer molecular weight increase to 20,000. 2. Synthesized the PDI to 2.0. LGD‐WCS developed at UHD large size TV into mass production.
Materialart:
Online-Ressource
ISSN:
0097-966X
,
2168-0159
DOI:
10.1002/sdtp.2015.46.issue-1
Sprache:
Englisch
Verlag:
Wiley
Publikationsdatum:
2015
ZDB Id:
2526337-7