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Uchiya, Naoyuki ; Furuta, Yusuke ; Nishikawa, Hiroyuki ; [et al.]

Springer Science and Business Media LLC ; 2008

In: Microsystem Technologies Vol. 14, No. 9-11 ( 2008-10), p. 1537-1540

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In: Microsystem Technologies, Springer Science and Business Media LLC, Vol. 14, No. 9-11 ( 2008-10), p. 1537-1540

Type of Medium: Online Resource

ISSN: 0946-7076 , 1432-1858

URL: Article

DOI: 10.1007/s00542-007-0549-0

RVK:

ZG 1100

Language: English

Publisher: Springer Science and Business Media LLC

Publication Date: 2008

detail.hit.zdb_id: 1476561-5

detail.hit.zdb_id: 1223008-X

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