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Meszmer, Peter ; Hiller, Karla ; Hartmann, Steffen ; [et al.]

Springer Science and Business Media LLC ; 2014

In: Microsystem Technologies Vol. 20, No. 6 ( 2014-6), p. 1041-1050

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In: Microsystem Technologies, Springer Science and Business Media LLC, Vol. 20, No. 6 ( 2014-6), p. 1041-1050

Type of Medium: Online Resource

ISSN: 0946-7076 , 1432-1858

URL: Article

DOI: 10.1007/s00542-014-2143-6

RVK:

ZG 1100

Language: English

Publisher: Springer Science and Business Media LLC

Publication Date: 2014

detail.hit.zdb_id: 1476561-5

detail.hit.zdb_id: 1223008-X

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