In:
Microsystem Technologies, Springer Science and Business Media LLC, Vol. 24, No. 10 ( 2018-10), p. 4089-4099
Type of Medium:
Online Resource
ISSN:
0946-7076
,
1432-1858
DOI:
10.1007/s00542-017-3640-1
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2018
detail.hit.zdb_id:
1476561-5
detail.hit.zdb_id:
1223008-X