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Lo, Yu-Lung ; Wang, Hsi-Hua ; Li, Yu-Hsin ; [et al.]

Springer Science and Business Media LLC ; 2021

In: Microsystem Technologies Vol. 27, No. 4 ( 2021-04), p. 1347-1357

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In: Microsystem Technologies, Springer Science and Business Media LLC, Vol. 27, No. 4 ( 2021-04), p. 1347-1357

Type of Medium: Online Resource

ISSN: 0946-7076 , 1432-1858

URL: Article

DOI: 10.1007/s00542-018-4252-0

RVK:

ZG 1100

Language: English

Publisher: Springer Science and Business Media LLC

Publication Date: 2021

detail.hit.zdb_id: 1476561-5

detail.hit.zdb_id: 1223008-X

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