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Huang, Weiqing ; Lai, Liyi ; Chen, Xiaosheng ; [et al.]

Springer Science and Business Media LLC ; 2021

In: Microsystem Technologies Vol. 27, No. 8 ( 2021-08), p. 3049-3057

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In: Microsystem Technologies, Springer Science and Business Media LLC, Vol. 27, No. 8 ( 2021-08), p. 3049-3057

Type of Medium: Online Resource

ISSN: 0946-7076 , 1432-1858

URL: Article

DOI: 10.1007/s00542-020-05076-1

RVK:

ZG 1100

Language: English

Publisher: Springer Science and Business Media LLC

Publication Date: 2021

detail.hit.zdb_id: 1476561-5

detail.hit.zdb_id: 1223008-X

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