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Liao, Chen-Yu ; Chien, Hung-Hua ; Hao, Yu-Chuan ; [et al.]

Springer Science and Business Media LLC ; 2018

In: Journal of Electronic Materials Vol. 47, No. 7 ( 2018-7), p. 3861-3868

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In: Journal of Electronic Materials, Springer Science and Business Media LLC, Vol. 47, No. 7 ( 2018-7), p. 3861-3868

Type of Medium: Online Resource

ISSN: 0361-5235 , 1543-186X

URL: Article

DOI: 10.1007/s11664-018-6260-3

Language: English

Publisher: Springer Science and Business Media LLC

Publication Date: 2018

detail.hit.zdb_id: 2032868-0

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