In:
Journal of Electronic Materials, Springer Science and Business Media LLC, Vol. 50, No. 3 ( 2021-03), p. 978-986
Type of Medium:
Online Resource
ISSN:
0361-5235
,
1543-186X
DOI:
10.1007/s11664-020-08617-6
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2021
detail.hit.zdb_id:
2032868-0