In:
Journal of Electronic Materials, Springer Science and Business Media LLC, Vol. 51, No. 12 ( 2022-12), p. 7113-7121
Type of Medium:
Online Resource
ISSN:
0361-5235
,
1543-186X
DOI:
10.1007/s11664-022-09947-3
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2022
detail.hit.zdb_id:
2032868-0