In:
Journal of Electronic Materials, Springer Science and Business Media LLC, Vol. 52, No. 9 ( 2023-09), p. 5884-5900
Type of Medium:
Online Resource
ISSN:
0361-5235
,
1543-186X
DOI:
10.1007/s11664-023-10550-3
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2023
detail.hit.zdb_id:
2032868-0