In:
Journal of Electronic Materials, Springer Science and Business Media LLC, Vol. 52, No. 11 ( 2023-11), p. 7554-7565
Type of Medium:
Online Resource
ISSN:
0361-5235
,
1543-186X
DOI:
10.1007/s11664-023-10670-w
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2023
detail.hit.zdb_id:
2032868-0