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Hartney, M.A. ; Rothschild, M. ; Kunz, R.R. ; [et al.]

Elsevier BV ; 1991

In: Microelectronic Engineering Vol. 13, No. 1-4 ( 1991-3), p. 51-56

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In: Microelectronic Engineering, Elsevier BV, Vol. 13, No. 1-4 ( 1991-3), p. 51-56

Type of Medium: Online Resource

ISSN: 0167-9317

URL: Article

DOI: 10.1016/0167-9317(91)90046-G

Language: English

Publisher: Elsevier BV

Publication Date: 1991

detail.hit.zdb_id: 1497065-X

detail.hit.zdb_id: 605230-7

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