In:
Microelectronic Engineering, Elsevier BV, Vol. 28, No. 1-4 ( 1995-6), p. 105-108
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/0167-9317(95)00025-4
Language:
English
Publisher:
Elsevier BV
Publication Date:
1995
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7