In:
Microelectronic Engineering, Elsevier BV, Vol. 60, No. 1-2 ( 2002-1), p. 143-148
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/S0167-9317(01)00590-1
Language:
English
Publisher:
Elsevier BV
Publication Date:
2002
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7