In:
Microelectronic Engineering, Elsevier BV, Vol. 61-62 ( 2002-07), p. 295-300
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/S0167-9317(02)00565-8
Language:
English
Publisher:
Elsevier BV
Publication Date:
2002
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7