In:
Microelectronic Engineering, Elsevier BV, Vol. 35, No. 1-4 ( 1997-02), p. 305-308
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/S0167-9317(96)00134-7
Language:
English
Publisher:
Elsevier BV
Publication Date:
1997
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7