In:
Microelectronic Engineering, Elsevier BV, Vol. 46, No. 1-4 ( 1999-5), p. 461-464
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/S0167-9317(99)00040-4
Language:
English
Publisher:
Elsevier BV
Publication Date:
1999
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7