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Yun, Minseong ; Kim, Myoung-Seok ; Ko, Young-Don ; [et al.]

Elsevier BV ; 2005

In: Microelectronic Engineering Vol. 77, No. 1 ( 2005-1), p. 48-54

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In: Microelectronic Engineering, Elsevier BV, Vol. 77, No. 1 ( 2005-1), p. 48-54

Type of Medium: Online Resource

ISSN: 0167-9317

URL: Article

DOI: 10.1016/j.mee.2004.08.009

Language: English

Publisher: Elsevier BV

Publication Date: 2005

detail.hit.zdb_id: 1497065-X

detail.hit.zdb_id: 605230-7

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