In:
Microelectronic Engineering, Elsevier BV, Vol. 82, No. 3-4 ( 2005-12), p. 600-606
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2005.07.063
Language:
English
Publisher:
Elsevier BV
Publication Date:
2005
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7