In:
Microelectronic Engineering, Elsevier BV, Vol. 84, No. 5-8 ( 2007-5), p. 797-801
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2007.01.128
Language:
English
Publisher:
Elsevier BV
Publication Date:
2007
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7