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Wu, Jiagang ; Xiao, Dingquan ; Zhu, Jiliang ; [et al.]

Elsevier BV ; 2008

In: Microelectronic Engineering Vol. 85, No. 2 ( 2008-2), p. 304-307

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In: Microelectronic Engineering, Elsevier BV, Vol. 85, No. 2 ( 2008-2), p. 304-307

Type of Medium: Online Resource

ISSN: 0167-9317

URL: Article

DOI: 10.1016/j.mee.2007.06.019

Language: English

Publisher: Elsevier BV

Publication Date: 2008

detail.hit.zdb_id: 1497065-X

detail.hit.zdb_id: 605230-7

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