In:
Microelectronic Engineering, Elsevier BV, Vol. 85, No. 5-6 ( 2008-05), p. 778-781
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2008.01.042
Language:
English
Publisher:
Elsevier BV
Publication Date:
2008
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7