KOBV Portal

Hits per page

hit 1 - 1 | 1 hit

Select All Export

Online Resource

Li, Ming-Yen ; Su, Mei-Yun ; Chang, Te-Fu ; [et al.]

Elsevier BV ; 2008

In: Microelectronic Engineering Vol. 85, No. 7 ( 2008-7), p. 1502-1510

add to watchlist on the watchlist

Details

In: Microelectronic Engineering, Elsevier BV, Vol. 85, No. 7 ( 2008-7), p. 1502-1510

Type of Medium: Online Resource

ISSN: 0167-9317

URL: Article

DOI: 10.1016/j.mee.2008.02.003

Language: English

Publisher: Elsevier BV

Publication Date: 2008

detail.hit.zdb_id: 1497065-X

detail.hit.zdb_id: 605230-7

Library	Location	Call Number	Volume/Issue/Year	Availability

Others were also interested in ...

Online Resource

Availability (electronic / print)

hit 1 - 1 | 1 hit

Kooperativer Bibliotheksverbund