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Kim, Dong Sung ; Kim, Dong Sung (Danny) ; Han, Kyungsup ; [et al.]

Elsevier BV ; 2009

In: Microelectronic Engineering Vol. 86, No. 4-6 ( 2009-04), p. 1343-1346

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In: Microelectronic Engineering, Elsevier BV, Vol. 86, No. 4-6 ( 2009-04), p. 1343-1346

Type of Medium: Online Resource

ISSN: 0167-9317

URL: Article

DOI: 10.1016/j.mee.2009.01.017

Language: English

Publisher: Elsevier BV

Publication Date: 2009

detail.hit.zdb_id: 1497065-X

detail.hit.zdb_id: 605230-7

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