In:
Microelectronic Engineering, Elsevier BV, Vol. 86, No. 10 ( 2009-10), p. 2063-2066
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2009.01.058
Language:
English
Publisher:
Elsevier BV
Publication Date:
2009
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7