In:
Microelectronic Engineering, Elsevier BV, Vol. 88, No. 4 ( 2011-4), p. 362-365
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/j.mee.2010.09.025
Language:
English
Publisher:
Elsevier BV
Publication Date:
2011
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7